Web1 dec. 1994 · Analysis of the experimental data on energy and angular distributions has revealed a large variety of sputtering modes such as elastic and inelastic collisional sputtering, ion-induced thermal evaporation, ejection of excited atoms, sputtering due to exciton decay, formation of clusters or ejection of grains, sputtering by shock waves and ... Web15 aug. 2014 · Angular distributions of sputtered atoms. The most striking differences between SRIM and SDTrimSP were found for the angular distributions f(β,φ) of sputtered atoms with polar emission angle β and azimuthal angle φ.For normal ion incidence we would expect a cosine distribution f(cosβ) = f 0 cosβ [38].To plot the calculated angular …
Angular distribution of ion beams energy and flux in a …
Web4 jun. 1998 · In this article, we report values of ion energy and angular distributions measured at the grounded electrode of an inductively coupled discharge in … WebA gridded ion chamber was used to measure the fission fragment angular distribution and total kinetic energy for the exp 235 U(n,f) reaction from 0.18 to 8.81 掌桥科研 一站式科研服务平台 corporations and trusts
Ion angular distribution simulation of the Highly Efficient …
Web18 sep. 2024 · We investigate the energy and angular distributions of ions reaching the electrodes in low-pressure, capacitively coupled oxygen radio-frequency discharges. … Web28 sep. 2024 · The ion energy and angular distributions of H +, H 2 +, and H 3 + impinging on an extraction aperture (3 mm in radius) have been investigated with a hybrid model of an inductively coupled H 2 ion source. A dc is applied at the end of the cylinder discharge chamber, which pulls these three ions toward the extraction aperture. Web1 sep. 1999 · The energy distribution of the Ar + ions impinging on the cathode (target) is of crucial importance for the average sputtering yield. In order to calculate the energy distribution of Ar + ions falling on the cathode of a low pressure d.c. glow discharge in argon we have used a two-dimensional Monte Carlo code that simulates the ion … corporations and the public investor